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update 220501

 

High-speed, high brightness, (Quasi-)SM VCSEL array for sensing and optical wireless communication

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High-power vertical-cavity surface-emitting laser (VCSEL) arrays, which can serve as the light source in modern lidar and 3-diemensional (3-D) optical sensing systems, have recently attracted a lot of attention. In these types of systems, the time-of-flight (ToF) technique, based on the round-trip time of short optical pulses is usually adopted. Further enhancement of the ranging distance and depth resolution in these ToF driven systems by the incorporation of a VCSEL array with a high available power, high brightness (narrow divergence angle), and fast response time is highly desirable. However, a large number of light emission apertures (several hundreds) in the VCSEL array is usually necessary to raise output power level to several Watts. This leads to a large parasitic capacitance and the RC-limited bandwidth may become the dominant limiting factor of the speed of the high-power VCSEL array. In this work, Zn-diffusion and oxide-relief apertures are used to manipulate the optical modes and reduce the parasitic capacitance, respectively, in a unit device for a 940 nm VCSEL array. The demonstrated VCSEL array has a quasi-single-mode (QSM) output, high available power (4W; 1% duty cycle), narrow divergence angle (~140 at 1/e2) under maximum output power, and a fast rise time (< 100 ps). These results open up new possibilities for further enhancing the performance of ToF sensing systems at the 940 nm wavelength.


Figure 1. cross-sectional view (a) and top-view (b) of the demonstrated white-light LED. The inset shows the layout of MQW layers with different center wavelengths.


Figure 2 (a). The measured optical spectrum of TJS white-light IR LED under a 60mA bias current. (b) Measured spectra under SLD operation mode


Related papers:

1. Jin-Wei Shi, Kai-Lun Chi, Jin-Hao Chang, Zhi-Rui Wei, Jia-Wei Jiang, and Ying-Jay Yang, “Single-Mode Vertical-Cavity Surface-Emitting Lasers Array with High-Power and Narrow Far-Field Divergence Angle” IEEE Photonics Journal, vol. 5, no. 6, pp. 1502508, Dec., 2013.

2. Jia-Liang Yen, Kai-Lun Chi, Jia-Wei Jiang, Ying-Jay Yang, and Jin-Wei Shi, “Single-Mode Vertical-Cavity Surface-Emitting Lasers Array with Zn-Diffusion Aperture for High-Power, Single-Spot, and Narrow Divergence Angle Performance,” IEEE J. of Quantum Electronics, vol. 50, pp. 787-794, Oct., 2014.

3. Jia-Liang Yen, Xin-Nan Chen, Kai-Lun Chi, Jason Chen, and Jin-Wei Shi,“850 nm Vertical-Cavity Surface-Emitting Laser Arrays With Enhanced High-Speed Transmission Performance Over a Standard Multimode Fiber,” IEEE/OSA Journal of Lightwave Technology, vol. 35, pp. 3242-3249, Aug., 2017.

4. Zuhaib Khan, Jie-Chen Shih, Rui-Lin Chao, Tzong-Liang Tsai, Hsin-Chuan Wang, Gang-Wei Fan, Yu-Chen Lin, Jin-Wei Shi, “High-Brightness and High-Speed Vertical-Cavity Surface-Emitting Laser Arrays,” Optica, vol. 7, no. 4, pp. 267-275, April, 2020.

5. Jin-Wei Shi, Zuhaib Khan, Ray-Hua Horng, Hsiao-Yun Yeh, Chun-Kai Huang, Cheng-Yi Liu, Jie-Chen Shih, Yung-Hao Chang, Jia-Liang Yen, and Jinn-Kong Sheu, “High-power and single-mode VCSEL arrays with single-polarized outputs by using package-induced tensile strain,” Optics Letters, vol. 45, No. 17, pp. 4839-4842, Sep., 2020.

6. Zuhaib Khan, Yong-Hao Chang, Te-Lieh Pan, Yaung-Cheng Zhao, Yen-Yu Huang, Chia-Hung Lee, Jui-Sheng Chang, Cheng-Yi Liu, Cheng-Yuan Lee, Chao-Yi Fang, and Jin-Wei Shi, "High-Brightness, High-Speed, and Low-Noise VCSEL Arrays for Optical Wireless Communication," in IEEE Access, vol. 10, pp. 2303-2317, 2022, doi: 10.1109/ACCESS.2021.3133436.

7. Jie-Chen Shih, Zuhaib Khan, Yung-Hao Chang, and Jin-Wei Shi, “High-Brightness VCSEL Arrays with Inter-Mesa Waveguides for the Enhancement of Efficiency and High-Speed Data Transmission,” IEEE Journal of Selected Topics in Quantum Electronics vol. 28, no. 1, pp. 1-11, Jan.-Feb. 2022.